采用pn结隔离技术制作的硅单晶压阻力敏传感器,因工作温度范围为-40～+80℃,使其在一些特殊高温环境(汽车电子、采油业等)中的应用受到限制。采用介质隔离的蓝宝石力敏传感器,工作温度特性得到了改善,国外业已商品化,国内虽已研究多年,但由于工艺复杂,成本高,加之难度大而仍未进入应用阶段。 The silicon single crystal piezoresistive sensor fabricated by pn junction isolation technology has limited its application in some special high temperature environments (automotive electronics, oil production, etc.) due to its operating temperature range of -40 ~ + 80 ℃. The use of media-isolated sapphire force sensor, the working temperature characteristics have been improved, the foreign industry has been commercialized, although the domestic research has been for many years, but due to complex technology, high cost, coupled with the difficulty of large and still not yet entered the application stage.