论文部分内容阅读
对三氟化氮(NF3)的裂解反应,尤其是在金属、非金属存在条件下的裂解反应情况作了分析,并使用热力学方法对NF3与多种金属的反应进行了热力学计算,从热力学角度、金属的熔点、热导率、比热容方面优选出了11种适合作为NF3充装、储存、反应器制备材料。研究结果将有助于优选出最合适的NF3充装、储存、反应器制备材料。
The cracking reaction of nitrogen trifluoride (NF3), especially in the presence of metals and nonmetals, was analyzed. The thermodynamic method was used to calculate the reaction between NF3 and various metals. From the thermodynamic point of view, , Metal melting point, thermal conductivity, specific heat capacity of the 11 out of the best suited as NF3 filling, storage, reactor preparation materials. The results will help to optimize the most suitable NF3 filling, storage, reactor preparation materials.