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四硼酸锂(Li_2B_4O_7,LBO)晶体是一种性能优异的压电基片材料,坩埚下降法生长的直径为76 mm LBO晶体已成功应用于声表面波(SAW)和体波(BW)器件。由于硼酸盐熔体粘度大、晶体易开裂,生长直径为102 mm的LBO晶体产业化还有很大难度。本工作根据坩埚下降法技术特点,提出了转向生长LBO晶体的工艺方案,成功生长出60 mm×110 mm×120 mm板状晶体。晶体沿[001]方向快速生长,侧面主面为(110)。生长的板状晶体经准确定向、加工后即可获得高度60 mm、直径为102 mm(4 in)的[110]取向LBO晶体,生长速率和晶体产率较传统方法都有显著提高。
Lithium tetraborate (Li_2B_4O_7, LBO) crystal is a kind of piezoelectric substrate with excellent performance. The diameter of the LBO crystal grown by the crucible down method is 76 mm. LBO crystals have been successfully applied to SAW and BW devices. Due to the high viscosity of the borate melt, the crystals are easy to crack. It is still very difficult to industrialize the LBO crystal with a diameter of 102 mm. According to the technical characteristics of the crucible drop method, this work proposes a process scheme of turning to growing LBO crystal, and successfully grows a plate-shaped crystal of 60 mm × 110 mm × 120 mm. The crystal grew rapidly in the [001] direction with the major side of (110). The growth of plate-like crystals can be accurately oriented and the [110] -oriented LBO crystals with a height of 60 mm and a diameter of 102 mm (4 in.) Can be obtained after processing. The growth rate and the crystal yield of the LBO crystals are obviously improved compared with the traditional methods.