论文部分内容阅读
利用聚合物材料SU-8作为芯层、聚合物材料PMMA作为上包层、无机材料SiO2作为下包层,设计并制备了一种有机/无机混合波导2×2定向耦合-马赫曾德尔(DC-MZI)热光开关。为了保证波导中的单模传输、减小模式辐射和衬底泄露损耗、缩短响应时间并降低器件功耗,对其结构参数做了优化。利用涂膜、湿法刻蚀等工艺制备了器件样品。在1 550nm波长下,器件的交叉态和直通态的驱动功率分别为0和7.8mW(开关功率为7.8mW),交叉态和直通态的两端口串扰分别为-9dB和-12.8dB。在方波驱动电压信号作用下,测得器件交叉端口的上升时间和下降时间分别为138μs和136μs,直通端口的上升时间和下降时间分别为63μs和140μs。制备的混合结构器件综合利用了芯层聚合物材料热光系数大、上/下缓冲层厚度均较小以及Si/SiO2导热系数大的优点,因此同时具备了较低的功耗和较快的响应时间,在低功耗、快速光通信系统中具有较好的应用前景。
The polymer material SU-8 as the core layer, the polymer material PMMA as the upper cladding layer, and the inorganic material SiO2 as the lower cladding layer were designed and prepared by an organic / inorganic hybrid waveguide 2 × 2 directional coupling-Machn Zehnder DC -MZI) thermal switch. In order to ensure single mode transmission in the waveguide, reduce the mode radiation and substrate leakage loss, shorten the response time and reduce the power consumption of the device, its structural parameters are optimized. Device samples were prepared by coating, wet etching and other processes. At 1 550 nm, the crossover and straight-through driving powers of the device are 0 and 7.8 mW (switching power 7.8 mW) respectively, and the crosstalk between the cross-talk and straight-through states is -9 dB and -12.8 dB, respectively. Under the action of the square wave driving voltage signal, the rise time and fall time of the cross port of the device are measured respectively 138μs and 136μs, the rise time and fall time of the through port are respectively 63μs and 140μs. The prepared hybrid structure device utilizes the advantages of large thermal coefficient of the core polymer material, small thickness of the upper / lower buffer layer and large thermal conductivity of Si / SiO2, so that both the lower power consumption and the faster Response time, low power, fast optical communication system has a good application prospects.