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采用磁控溅射法制备了Nd Fe B/Nd 2组薄膜,经650℃退火处理后,对样品进行了XRD和VSM测试分析。结果表明:对于Mo/Nd/Nd Fe B/Nd/Mo多层薄膜,当Nd Fe B/Nd厚度比为6/5时,薄膜的内禀矫顽力最好,平行和垂直方向的内禀矫顽力分别为14.5×79.6和10.5×79.6 k A·m~(-1);对于Mo/[Nd Fe B/Nd]n/Mo(n=2,5,8,10;Nd Fe B/Nd厚度比为6/5)交替多层薄膜,当周期n为8时,薄膜具有最好的磁性能,平行和垂直方向的内禀矫顽力分别为21.3×79.6和16.7×79.6 k A·m~(-1);对于Nd Fe B/Nd厚度比均为6/5的薄膜,交替多层膜的综合磁性能高于多层膜。
Nd Fe B / Nd 2 thin films were prepared by magnetron sputtering. After annealed at 650 ℃, the samples were analyzed by XRD and VSM. The results show that the intrinsic coercive force of the films is the best for the Mo / Nd / Nd Fe B / Nd / Mo multilayers when the Nd Fe B / Nd ratio is 6/5, and the intrinsic and co- The coercive forces were 14.5 × 79.6 and 10.5 × 79.6 kA · m -1, respectively. For Mo / [Nd Fe B / Nd] n / Mo (n = 2, 5, 8, 10; Nd Fe B / Nd thickness ratio of 6/5). When the period n is 8, the film has the best magnetic properties, the intrinsic coercivities in the parallel and perpendicular directions are 21.3 × 79.6 and 16.7 × 79.6 kA · m ~ (-1). For the films with Nd Fe B / Nd thickness ratio of 6/5, the overall magnetic properties of the multilayered films were higher than that of the multilayered films.