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本文根据目前国内多弧离子镀设备的生产和应用情况提出了一种新的观点。对可组合的双镀膜室多弧离子镀膜设备进行了初步的探讨
In this paper, according to the current domestic multi-arc ion plating equipment production and application of a new point of view. The combination of double coating room multi-arc ion plating equipment for a preliminary discussion