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利用正弦相位调制干涉技术检测微小位移,精度可达纳米量级。采用全光纤光路,结构简单,并可实时非接触测量。
Sine phase modulation interferometry detects small displacements with accuracies in the order of nanometers. All-fiber optical path, simple structure, and real-time non-contact measurement.