一、引言扫描电镜是近代发展很快、用途日益广泛的重要电子光学仪器之一。自1965年正式投入商品生产以来,已有18年多的历史。扫描电镜作为表面形貌观察的仪器,主要是向高分辨率和更薄表面的显微分析方向发展,并对图象的质量控制和原位分析实现了全面的电子计算机化和多功能化。鉴于扫描电镜 I. INTRODUCTION SEM is one of the important electronic optical instruments which has been developed rapidly in recent years and has been widely used. Since 1965 formally put into production, has more than 18 years of history. Scanning electron microscopy, as an instrument for surface morphology observation, has been developed primarily for microscopic analysis of high resolution and thinner surfaces, and has achieved full computerization and versatility of image quality control and in situ analysis. Given the scanning electron microscope