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硅中掺入等价元素Ｇｅ，可以提高硅单晶的机械强度。本文报道了用三点弯曲法、冲击法对不同Ｇｅ含量硅片机械强度的研究结果及影响ＣＺＳｉ机械强度的掺Ｇｅ最小量，探讨了Ｇｅ增加硅片机械强度的机理。
Silicon incorporates the equivalent element Ge, can improve the mechanical strength of silicon single crystal. In this paper, the results of the study on the mechanical strength of silicon wafers with different Ge contents and the minimum amount of Ge doped CZSi mechanical strength by three-point bending method and impact method are reported. The mechanism of Ge’s increasing the mechanical strength of silicon wafers is also discussed.