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本文对一种自制的场发射电子枪(FEG)的结构、使用以及发射和稳定特性作了详细的报道.经测量表明:FEG在枪室真空为6.67×10-7Pa,场发射工作电流0.9μA的条件下,其束流稳定性优于5%(10min);又当加速电压为40kV时,其虚源半径小于1.3nm;而亮度则大于5×109A/cm2·sr.说明它是一种高亮度小束斑的点状电子源.在SEM,STEM和其它先进的电真空分析仪器以及电子束加工等方面,具有广泛推广的实用价值.
In this paper, the structure, usage, emission and stability characteristics of a home-made field emission electron gun (FEG) are reported in detail. The measurement results show that the beam stability of FEG is better than 5% (10min) when the chamber vacuum is 6.67 × 10-7Pa and the field emission current is 0.9μA. When the accelerating voltage is 40kV, The virtual source radius is less than 1.3nm; while the brightness is greater than 5 × 109A / cm2 · sr. It shows that it is a high-brightness beamlet spot electron source. In the SEM, STEM and other advanced vacuum analysis instruments and electron beam processing, has a wide range of practical value.