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提出了一种基于实数编码量子进化算法(RQEA)的宽角度极紫外(EUV)多层膜理论膜系的设计方法。采用基于实数编码的遗传算法(RGA)和RQEA对宽角度Mo/Si多层膜进行了理论设计和分析,发现RQEA具有种群规模小、搜索效率高和求解精度高的明显优势,体现出RQEA在光学薄膜设计领域的潜在应用价值。同时,设计出入射光波长为13.5nm、在入射角0°~18°范围内反射率可达50%的宽反射带Mo/Si多层膜。
A design method of the wide-angle EUV multilayer film theory based on RQEA (real-coded quantum evolutionary algorithm) is proposed. The RGA and RQEA are used to design and analyze the wide-angle Mo / Si multilayers. It is found that RQEA has the obvious advantages of small size, high search efficiency and high solution precision. It shows that RQEA Optical film design in the field of potential application value. At the same time, a wide reflection band Mo / Si multilayers with a reflection wavelength of 13.5 nm and a reflectivity of 50% at an incident angle of 0 ° ~ 18 ° are designed.