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报道了以TiCl4 和V2 O5为源 ,采用等离子增强化学气相沉积 (PECVD)和溶胶 -凝胶 (sol-gel)技术制备了TiO2 /V2 O5双层薄膜 ,将该薄膜沉积在带有金梳状电极的陶瓷管和硅片上 ,进行了X射线衍射(XRD)分析 ,并且测量其对三甲基胺 (TMA)的气敏特性。结果发现该双层薄膜对TMA具有高灵敏度、良好的选择特性和快速的响应恢复特性。
A TiO2 / V2 O5 bilayer thin film was prepared by plasma enhanced chemical vapor deposition (PECVD) and sol-gel technique using TiCl4 and V2 O5 as the source. The thin film was deposited on a gold- Electrode tubes and silicon wafers were subjected to X-ray diffraction (XRD) analysis and their gas sensing properties for trimethylamine (TMA) were measured. The results show that the bilayer film has high sensitivity to TMA, good selection characteristics and rapid response recovery characteristics.