如同半导体工业所见到的那样,电子学器件的小型化、薄膜化对材料提出了更高的要求,其性能不仅受到材料的内部结晶缺陷和杂质等的影响;而且还受材料的表面组分、结构及能态的影响。如表面机械损伤、周围的气氛、杂质的沾污等都可严重地影响材料的性能。这种与固体表面密切相关的现象相当多。例如,金属材料的腐蚀、防腐及表面处理等均直接影响材料的机械性质和寿命。此外,光的反射和吸收,热 As seen in the semiconductor industry, the miniaturization and thinning of electronic devices have placed higher demands on materials whose properties are affected not only by the internal crystal defects and impurities of the materials, but also by the surface component of the material , Structure and energy status of the impact. Such as the surface of mechanical damage, the surrounding atmosphere, impurity contamination can seriously affect the performance of the material. This phenomenon is closely related to the solid surface. For example, the corrosion of metal materials, corrosion and surface treatment, etc., directly affect the mechanical properties and life of the material. In addition, the light reflects and absorbs heat