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采用降阶建模为静电梳齿驱动执行器开发了一个二维有限元模型,将梳齿驱动器简化为一组等价的集总参数单元,各单元均体现了对应器件的静动态特性和输入输出特性,降阶得到的模型降低了计算的复杂程度,提高了计算的速度.对采用降阶模型法所建立的模型仿真,得出梳齿驱动执行器的驱动位移、静电力与结构参数和所施加电压关系的仿真结果.该方法能以较快的速度求解静电-结构耦合问题,所得结果与有限元解相比较,最大位移误差小于5%.
A two-dimensional finite element model is developed for the electrostatic comb-tooth actuator using reduced-order modeling. The comb-tooth actuator is reduced to a set of equivalent lumped parameter units. Each unit reflects the static and dynamic characteristics of the corresponding device and the input Output characteristics and the reduced order model reduce the computational complexity and increase the speed of calculation.For the model simulation of the model with the reduced order model method, the driving displacement, electrostatic force and structural parameters The simulation results show that the proposed method can solve the electrostatic-structural coupling problem at a faster speed than the finite element method. The maximum displacement error is less than 5%.