Zn nano rods were produced on glass substrates using oblique angle deposition method at different deposition angles.For oxidation,the samples were placed in a furnace under oxygen flux.AFM and FESEM images were used to morphology analysis of the structures.The results showed that with increasing the angle of deposition,the grain size decreases and the porosity of the structures increases.XRD pattern and XPS depth profile analysis were used to crystallography and oxide thickness investigations,respectively.The XRD results confirmed oxide phase formation,and the XPS results analyzed the oxide layer thickness.The result showed that as the deposition angle of the nanorods increases,the thickness of the oxide layer increases.The reason for the increase in the thickness of the oxide layer with increasing deposition angle was investigated and attributed to the increase in the porosity of the thin films.The optical spectra of the structures for p polarized light at 10° incident light angle were obtained using single beam spectrophotometer in the 300 nm to 1000 nm wavelengths.The results showed that the formed structures although annealed in oxygen flux,tend to behave like metal.To calculate the optical constant of the structures,the reverse homogenization theory was used and the void fraction and complex refractive index of the structures were obtained.Finally,by calculating permittivity and optical conductivity of the structures,their changes with the deposition angle were investigated.