【摘 要】
：
For photon detection,superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices.In this study,we report our recent work in developing Ti-/Au-based TES.The Ti/Au TES devices were designed and implemented with a t
【机 构】
：
Institute of Materials,China Academy of Engineering Physics,Mianyang 621000,China;Institute of Micro
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For photon detection,superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices.In this study,we report our recent work in developing Ti-/Au-based TES.The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology.The characteristics were evaluated and analyzed,including surface morphology,3D deformation of suspended Ti/Au TES device structure,I-V characteristics,and low-temperature superconductivity.The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate.The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices,but the deformation does not affect the I-V characteristics of the devices.For devices with the Ti/Au bilayer (150 μm × 150 μm) and beams (100 μm × 25 μm),the transition temperature (Tc) is 253 mK with a width of 6 mK,and the value of the temperature sensitivity α is 95.1.
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