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Ptychography是一种基于扫描式相干衍射成像的相位恢复技术,实验装置简单,抗干扰能力强。将Ptychography技术用于投影物镜波像差的检测,并分析了检测不同数值孔径投影物镜波像差所采用的光场传播公式、离散化条件及实验架构。数值仿真与实验结果表明,Ptychography技术用于波像差检测时检测标记的通光率需要在45%~80%范围内;增加标记图案的复杂性并在计算过程中增加配准环节可提高收敛速度与检测精度;波像差检测精度在10~(-3)λ以内。将Ptychography技术应用于极紫外光刻投影物镜波像差检测是可行的。
Ptychography is a kind of phase recovery technique based on scanning coherent diffraction imaging. Its experimental setup is simple and its anti-interference ability is strong. The Ptychography technique was used to detect the aberration of the projection lens, and the propagation equation, discretization condition and experimental framework of the light field used to detect the wave aberrations of different numerical aperture projection objectives were analyzed. The numerical simulation and experimental results show that the Ptychography technique needs to be within the range of 45% ~ 80% for detecting wave-shaped aberration, increasing the complexity of the mark pattern and increasing the registration step in the calculation process to improve the convergence rate And detection accuracy; wave aberration detection accuracy within 10 ~ (-3) λ. It is feasible to apply Ptychography technology to EUV wave imaging.