一、概述静电多极偏转器是电、离子光学系统中的一个基础部件,近年来它在电子束曝光机和聚焦离子束装置中得到普遍的应用,其主要原因:1.扫描速度快,生产效率高;2.合理设计多极偏转器,其象差可做得较小,并对象散易于进行校正; I. Overview Electrostatic multipole deflector is a basic component of electrical and ion optics system. In recent years, it has been widely used in electron beam lithography and focused ion beam devices. The main reasons are as follows: 1. Fast scanning speed, High efficiency; 2 rational design multi-pole deflector, the aberration can be done small, and the object easy to be scattered;