报道锗硅合金在λ＝１．３μｍ的脊形单模光波导的设计、工艺及测量结果．这种光波导的传播损耗已达０．７ｄＢ／ｃｍ．脊形的高４～８μｍ，宽８～１２μｍ，均和单模光纤芯径相当．此外，其数值孔径在光波导的输入、输出端均能和单模光纤匹配，它已满足硅光集成对光波导的要求．文中最后报道了用这种锗硅合金光波导试制Ｙ分支器，并观察到二支分路输出的单模光斑． The design, process and measurement results of a ridge-shaped single-mode optical waveguide with Si = 1. 3μm were reported. The propagation loss of this optical waveguide has reached 0.7dB / cm. Ridges of high 4 ~ 8μm, width 8 ~ 12μm, and single-mode fiber core diameter quite. In addition, its numerical aperture in the optical waveguide input and output can be matched with the single-mode optical fiber, which has to meet the silicon optical integrated waveguide requirements. The article finally reported the use of such a germanium-silicon alloy optical waveguide pilot Y branch, and observed the output of the two branched single-mode spot.