一、引言由于研究受控核聚变装置中杂质和表面问题的兴趣日益增进,质谱测量已成为研究托卡马克装置中等离子体和壁相互作用的必要手段。在一些装置上已进行了这一工作。在 CT-6托卡马克装置运转初期,曾用回旋质谱计对系统的残余气体成份进行过分析。本文则总结该装置换上新真空室后,用四极质谱计和小质谱计进行质谱测量的结果。这些测量主要可以分为两类:一类是随着烘烤,放电清洗的进展,系统残余气体质谱的变化;另一类是放电前后质谱随时间的瞬态变化。 I. INTRODUCTION Due to the growing interest in studying impurity and surface problems in controlled nuclear fusion devices, mass spectrometry has become a necessary tool for studying the plasma-wall interaction in tokamak devices. This has been done on some devices. At the beginning of the operation of the CT-6 tokamak, the residual gas composition of the system was analyzed using a cyclotron spectrometer. This article summarizes the results of mass spectrometry measurements using a quadrupole mass spectrometer and a small mass spectrometer after the unit is replaced with a new vacuum chamber. These measurements can be mainly divided into two categories: one is the change of the residual gas mass spectrum with the progress of baking and discharge washing; the other is the transient change of the mass spectrum with time before and after discharge.