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采用带有0.1微米描画针的Talysep仪器已经检了验某些衍射光栅的槽型。目前,已可以检验槽型密度直到1200线/毫米的衍射光栅,并获得了良好结果。这种检验方法与电子显微镜技术相比是有优点的。
Some diffraction gratings have been examined for groove geometry using a Talysep instrument with a 0.1 micrometer drawn needle. At present, it has been possible to inspect the diffraction grating with groove densities up to 1200 lines / mm and obtain good results. This test method compared with electron microscopy is an advantage.