表面微机械加工是一种使机械部件微型化的工艺。传感器和致动器都是利用改进的集成电路制造技术来完成的。第一个表面微机械器件是谐振栅晶体管，大约在３０年以前就发表了。该晶体管的栅极采用了自由活动的金属悬梁，多晶硅表面微机械加工在十几年前就有报道，此后出现了许多传感器件的原型，并在最近制造出了第一只商品化的传感器。致动器，这种能向周围环境输出功率的表面微机械加工部件，已变得更加令人难以捉摸。在宏观事物中，一些无关紧要的现象在亚微米尺寸下变成了决定性的因素，如允许蚊子在水面上散步的表面张力，就是一个典型的例子。这些现象影响了正常的摩擦和损耗，尽管这些摩擦和损耗在宏观机械中是可以控制的，但当考虑微型机械部件时，就必须重新分析了，尽管存在这些难题，我们最终还是实现了基于表面微机械技术的微致动 Surface micromachining is a process that miniaturizes mechanical components. Sensors and actuators are all made using improved integrated circuit manufacturing techniques. The first surface-micromechanical device, a resonant gate transistor, was published about 30 years ago. The gate of the transistor uses a freely movable metal cantilever. Polysilicon surface micromachining has been reported more than a decade ago, and since then many prototypes of sensing devices have appeared and the first commercially available sensor has recently been manufactured. Actuators, surface micromachined components that output power to the surrounding environment, have become more elusive. In macroscopic things, a few insignificant phenomena have become decisive factors in the sub-micron size, such as the surface tension that allows mosquitoes to walk on the water, as a typical example. These phenomena affect the normal friction and wear, although these friction and loss can be controlled in the macroscopic machinery, but when considering the micro-mechanical components, we must re-analyze, in spite of these problems, we finally achieved based on the surface Micro-actuation of micro-mechanical technology