最近，UniversityofSouthCaroling的研究人员成功研制出蓝光LED，仅从适合于低成本大规模制造观点来看，就是一项重大突破。研究人员采用分子束外延技术（MBE）和低压金属有机汽相淀积（MOCVD）相结合的制造工艺。首先用MBE在Si片上生长一层氮化铝（AlN）缓冲层，然后用MOCVD生 Recently, researchers at University of South Carring successfully developed blue LEDs, a major breakthrough only from the standpoint of being suitable for low-cost mass production. The researchers used molecular beam epitaxy (MBE) and low pressure metal organic vapor deposition (MOCVD) a combination of manufacturing processes. Firstly, MBE was used to grow a layer of aluminum nitride (AlN) buffer layer on Si wafer and then MOCVD