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分别用ＴＥＭ、ＳＥＭ分析了ＭＯＤ－ＳｎＯ＿２粉末和薄膜，结果表明，根据热处理条件的不同，晶粒尺寸在几十纳米到微米之间；如果控制旋涂薄膜的厚度小于１００ｎｍ，并进行陡然升温热处理，则簿膜光滑无裂纹；即使得到的ＳｎＯ＿２膜存在微裂纹，但是由于微裂纹形成的颈部尺寸比薄膜厚度大得多，故其气敏特性仍然应当由膜厚决定。
The results of TEM and SEM analysis of the MOD-SnO 2 powder and thin films show that the grain sizes range from tens of nanometers to micrometers depending on the heat treatment conditions. If the thickness of the spin-on film is controlled to be less than 100 nm, the temperature-rising heat treatment , The book film is smooth and crack-free. Even though the obtained SnO 2 film has microcracks, the gas sensing properties should still be determined by the film thickness because the size of the neck formed by microcracking is much larger than the film thickness.