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本文介绍在SPG-Ⅰ和SPG-Ⅱ型数字干涉仪的基础上最近又研制成功CQG-Ⅰ数字式车间球面干涉仪的情况。菲索型的球面共心干涉系统,用立式承座支撑样板与工件,可以快速在监视器上显示光圈数;也可以在微机上显示局部误差的PV值与Rms值,测量精度为λ/20。仪器口径为φ60mm,F数为10～0.74,仪器的标准镜头引用了非球面及仪器采用双工作台,从而,使仪器的质量及功能均有提高与扩大。
This article describes the SPG-Ⅰ and SPG-Ⅱ-based digital interferometer based on the recent successful development of CQG-Ⅰ Digital Workshop Sphere Interferometer. Fischer-type spherical interference interference system, with vertical bearing support samples and the workpiece, you can quickly display the aperture on the monitor; you can also display the local error PV and Rms value of the computer, the measurement accuracy of λ / 20. Instrument diameter φ60mm, F number of 10 ~ 0.74, the instrument’s standard lens references the aspheric surface and the instrument dual-table, so that the quality and function of the instrument have increased and expanded.