立式接触式干涉仪是三等量块标准装置的主要配套设备,在量块检定过程中,立式接触式干涉仪通过对标准量块与被检量块的微差比较法,取得被检量块的修正值。因此,在检定前对立式接触式干涉仪进行有效的核查,是排除异因、保证检定数据真实准确的基础。笔者现结合多年工作经验,对立式接触式干 Vertical contact-type interferometer is the equivalent of the third block of standard equipment, the main ancillary equipment in the measuring block process, the vertical contact-type interferometer through the standard measuring block and the test block by the micro-difference method, was seized The correction value of the block. Therefore, the verification before the vertical contact interferometer for effective verification is to exclude different reasons, to ensure the true and accurate basis for the test data. The author is now working with many years of experience, the vertical contact dry