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1.前言当今社会正迎来高度信息化的时代,而 LCD(液晶显示)等显示器件以及光敏阵列等感光器件则是构成信息输入、输出终端的关键性器件。为提高上述器件的性能,有源矩阵板的应用研究十分活跃。有源矩阵基板是在玻片等衬底上,按矩阵状配置以晶体管为代表的众多有源元件。其中采用有源矩阵基板的 LCD(AM-LCD),是一项旨在实现可与 CRT 匹敌的高象质平板显示的强劲技术,尤其受到人们的关注。
1. Foreword Today’s society is ushering in a highly informative era, and LCD (Liquid Crystal Display) and other light-emitting devices and photosensitive devices such as light-sensitive devices constitute the information input and output terminals of the key components. In order to improve the performance of these devices, active matrix board applications are very active. The active matrix substrate is a large number of active elements typified by transistors arranged in a matrix on a glass substrate or the like. Among them, LCD (AM-LCD) using an active matrix substrate is a strong technique for realizing a high-definition flat panel display comparable to a CRT, and has drawn particular attention.