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In this work, oxygen plasma treatment and ozone treatment were both used for surface oxidative functionalization of exfoliated graphene(EG).For detail study, all samples were characterized by Fourier transform infrared (FTIR), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM).The results indicated that a wide variety of oxygen-containing groups were introduced on the surfaces of EG by both of the modification methods.