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Fabrication of a thin ceramic coating as a tritium permeation barrier on structural materials is a promising solution to mitigate tritium loss in fusion fuel breeding/recovery systems.Yttrium oxide(Y2O3)has a cubic-type crystal structure similar to erbium oxide(Er2O3)which has been intensively investigated for the last decade.A lower activation property by neutron irradiation is an advantage of Y2O3 over Er2O3.In this study,Y2O3 coatings have been fabricated by physical vapor deposition,and deuterium permeation has been measured in order to discuss the permeation mechanism through ceramic coatings with different microstructures and chemical compositions.