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弱光探测器在医学及空间测探等方面都有着极其重要的用途,硅光电倍增管(Si PM)作为弱光探测器有着优异的性能。所研制的体电阻淬灭Si PM,具有良好的单光子探测性能。提高了体电阻淬灭Si PM在蓝紫光区(360~420 nm)的探测效率,提出了一种深槽隔离结构的Si PM探测器,通过模拟优化了器件结构,并取得了初步实验结果。
Weak light detector in the medical and space exploration and other aspects have an extremely important purpose, silicon photomultiplier tube (Si PM) as a weak light detector has excellent performance. The developed body resistance quench Si PM, has a good single-photon detection performance. The detection efficiency of bulk resistance quenching Si PM in the blue-violet region (360-420 nm) is improved. A Si-PM detector with deep trench isolation structure is proposed. The structure of the device is optimized and the preliminary experimental results are obtained.