介绍了惯性约束聚变系统中米量级光学元件的中低频波面误差检测技术及其研究进展,包括大口径Fizeau干涉仪直接检测法、瑞奇-康芒检测法、斜入射检测法和子孔径拼接检测法。阐述了各种检测方法引入的测量误差及误差消除方法,对进一步提高波面误差测量精度的必要性和方法进行了展望。 In this paper, we introduce the research progress of middle and low frequency wavefront error detection of rice-class optical components in inertial confinement fusion system, including direct detection of large diameter Fizeau interferometer, Ricky-Conmont detection method, oblique incidence detection method and subaperture splicing detection law. The measurement errors and error elimination methods introduced by various detection methods are expounded. The necessity and methods of further improving the measurement accuracy of wavefront errors are also discussed.