为了从理论上解决阵列式半导体湿敏元件阻值随湿度的变化关系,本文引进了两种水分子与阵列作用的机制.其一,水分子与多晶硅表面及晶界的作用;其二,水分子与阵列结构的碰撞作用,进而计算了湿敏元件阻值随湿度的变化关系:R=R_0(1-Az%)/(1+Dx%)理论计算的结果与实验比较,其结果符合得很好. In order to theoretically solve the relationship between the resistance of the arrayed semiconductor humidity sensor and humidity, two mechanisms of interaction between water molecules and the array are introduced in this paper: First, the interaction between water molecules and polysilicon surface and grain boundaries; secondly, The collisions between the molecules and the array structure and the relationship between the resistance of the humidity sensor and the humidity were calculated. The theoretical calculation results of R = R_0 (1-Az%) / (1 + Dx%) are in good agreement with the experimental results well.