空间平均的角度散斑相关粗糙度测量模拟研究

来源 :光学学报 | 被引量 : 0次 | 上传用户:bibby_514
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角度散斑相关是一种不受表面粗糙度轮廓的间距特性影响的粗糙度幅度参量测量方法,它的数学模型通常建立在集平均的基础上。通过模拟计算随机粗糙表面的远场散斑场,以散斑图面上的空间平均代替常规的集平均来计算角度散斑相关系数,并应用集平均的数学模型反演粗糙度参量。结果证实了这种空间平均角度散斑相关粗糙度测量方法的有效性,在同一表面只需对少数个区域进行测量并对测得的粗糙度参量取平均,即可获得足够的测量精度。对于Rq大于2.0μm的表面,测量相对误差小于15%。根据最佳测量条件,该方法适用于大粗糙度表面。 Angle speckle correlation is a roughness amplitude parameter measurement method that is independent of the pitch characteristic of the surface roughness profile. Its mathematical model is usually based on the set average. By calculating the far-field speckle fields of random rough surface, the correlation coefficients of angle speckle are calculated by averaging the spatial average of the speckle plane instead of the conventional set average, and the roughness parameters of the set are averaged. The results validate the validity of this spatial-averaged speckle-related roughness measurement method, where sufficient measurement accuracy can be obtained by measuring only a few areas on the same surface and averaging the measured roughness parameters. For surfaces with Rq greater than 2.0 μm, the relative error of measurement is less than 15%. According to the best measurement conditions, this method is suitable for large surface roughness.
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