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材料表面抗反射性能在太阳能利用、光电子产品、红外传感和成像、军事隐身、以及航空航天等领域均具有重要应用价值。文中对材料表面抗反射特性的重要用途、人工实现路径、表面抗反射结构的研究现状及存在的问题等做了详细的论述。目前,国内外学者已经利用碳纳米管涂层和硅表面针状纳米结构实现了优异的超宽波谱抗反射性能。但迄今为止,金属表面微纳米结构的抗反射能力仍有很大的改善空间。作者所在的清华大学材料学院激光加工研究团队运用新一代高功率高频率超快激光,在金属表面制备出多种类型的特征微纳米结构,对其抗反射性能进行系统研究,实现了紫外-可见、紫外-近红外、紫外-中红外与紫外-远红外分别为2%、6%、5%和8%的超宽光谱超低反射率,并且在0~60°入射角度范围内无明显变化。进一步在微纳米结构基础上发展了“宏-微纳-纳米线”多级多尺度复合结构,在16~17μm波长处的总反射率低至0.6%,在14~18μm波长处总反射率不超过3%。上述优异超宽光谱抗反射性能预期具有良好应用前景。
Anti-reflective material surface properties in the solar energy utilization, optoelectronics, infrared sensing and imaging, military stealth, as well as aerospace and other fields have important application value. In this paper, the important use of surface anti-reflection properties of materials, artificial realization of the path, the surface anti-reflection structure of the status quo and existing problems are discussed in detail. At present, domestic and foreign scholars have achieved excellent ultra-wideband antireflection performance by using carbon nanotube coating and silicon surface acicular nanostructures. However, so far, there is still much room for improvement in the anti-reflection ability of the metal surface micro-nano structure. The author’s Tsinghua University School of Materials laser processing research team using a new generation of high-power high-frequency ultra-fast laser on the metal surface prepared a variety of types of micro-nano structure, its anti-reflection properties of a systematic study to achieve the UV - Visible , Ultra-wide-spectrum ultra-low reflectivity of 2%, 6%, 5% and 8% for UV-NIR, UV-IR and UV-IR respectively and no significant change in the incident angle range from 0 to 60 ° . Based on the micro / nano structure, the “macro-micro / nano-nano wire” multi-level and multi-scale composite structure was further developed. The total reflectance was as low as 0.6% at the wavelength of 16-17μm and the total reflection was at the wavelength of 14-18μm The rate does not exceed 3%. The excellent ultra-broad spectrum antireflection performance is expected to have good application prospects.