采用工艺调查与现场监测相结合的方法,研究了半导体行业废气排放中挥发性有机物(VOCs)的种类和排放水平。结果表明,共检测出26种有机物,其中以异丙醇排放量最大。采用排放系数法估算了2004年上海市半导体行业VOCs的排放量和2010年的预期排放量,并提出了加强和完善排放标准及清洁生产等控制措施的建议。 Using a combination of process investigation and on-site monitoring, the types and levels of volatile organic compounds (VOCs) in the exhaust emissions of the semiconductor industry were studied. The results showed that a total of 26 organic compounds were detected, of which isopropanol was the largest. The Emission Coefficient Method was used to estimate the emissions of VOCs in the semiconductor industry in Shanghai in 2004 and the expected emissions in 2010 and put forward suggestions on how to strengthen and improve the control measures such as emission standards and cleaner production.