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铜蒸气激光反射镜在非正入射的时候 ,两个不同的偏振态之间会产生不同的相移。通过优化设计 ,在4 90～ 5 30nm之间p、s波获得了 90°的相移 ,同时也使反射率在 99 998%以上。Ag层的厚度对于相移不敏感 ,并且当其厚度大于一定值的时候 ,对反射率没有影响。根据误差分析 ,制备薄膜时其沉积速率精度控制在± 1%以下 ,在光谱范围内能达到± 15 2 8°的相移误差 ,相移均在 5 0 4nm处附近存在有一个收敛值。折射率的变化控制在± 1%以下 ,在光谱范围内能达到± 12 77°的相移误差。最外一层厚度变化± 1% ,其相移变化达到± 5 5°,2～ 5层和 9～ 16层对相移的影响也在 0 .5°之上 ,其余各层对相移影响非常的小。使用时的入射角控制在± 1°时 ,在光谱范围内能达到± 2 .86°的相移误差。在 5 30nm附近的波段对入射角不敏感。
Copper vapor laser mirror in the non-normal incidence, the two different polarization state will produce a different phase shift. By optimizing the design, the p and s waves have a phase shift of 90 ° between 4 90 and 5 30 nm, and the reflectance above 99 998%. The thickness of the Ag layer is not sensitive to the phase shift and has no effect on the reflectance when its thickness is larger than a certain value. According to the error analysis, the deposition rate of the thin film can be controlled within ± 1% and the phase shift error of ± 15 2 8 ° can be achieved in the spectral range. The phase shift has a convergence value near 504 nm. The refractive index change is controlled within ± 1% and the phase shift error of ± 12 77 ° can be achieved in the spectral range. The thickness of the outermost layer changes ± 1%, the phase shift changes to ± 5 5 °, and the influence of 2 ~ 5 layers and 9 ~ 16 layers on the phase shift is also above 0.5 °. The influence of other layers on the phase shift Very small. When used with an angle of incidence of ± 1 °, a phase shift error of ± 2.86 ° can be achieved in the spectral range. The band around 5 30 nm is insensitive to the angle of incidence.