1.绪言由于空气静压导轨在正确使用时,摩擦、泄漏、热等的影响极小,其精度永久不会下降等原因,所以,近几年在电子元器件制造设备和测量仪器等方面应用越来越广。通过从四十代末一直到六十年代的研究,基本搞明白了基础理论。如果把这些理论应用 1. INTRODUCTION Due to the fact that the static pressure guide rail is used correctly, friction, leakage, heat and other effects of a small, the accuracy will never decline and other reasons, so in recent years in the electronic components manufacturing equipment and measuring instruments, etc. More and more widely. Through the study from the late forties to the sixties, we basically understood the basic theory. If these theories apply