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针对目前日益增多的超精密仪器仪表,一般给其提供良好工作环境的工作平台只能消除外界对其的振动干扰,对于仪器仪表自身各种执行机构动作所产生的干扰却无能为力。文中研究的微动平台不仅具有良好的定位功能,同时运用反定位原理,采用闭环PID控制算法,可以有效抑制设备自身产生的振动干扰,从而更全面地获得精密设备所需要的良好工作环境,实现真正意义上的超精密。
For the increasing number of ultra-precision instrumentation, generally provide a good working environment for its work platform can only eliminate the vibration of its external interference, for the instrument itself, the implementation of various agencies acting interference can not do anything. The micro-motion platform studied in this paper not only has a good positioning function, but also uses the anti-positioning principle and the closed-loop PID control algorithm, which can effectively suppress the vibration interference generated by the device itself, so as to obtain a better working environment for the precision equipment more fully and achieve Truly super precision.