离子束加工技术是目前所有特种加工方法中最精密和最微细的工艺,是当代毫微米级加工技术的基础,近几年来国外在离子刻蚀、离子注入、离子镀和离子溅射沉积等工艺的研究及应用方面取得了长足的进展。 Ion beam processing technology is the most sophisticated and the finest of all the special processing methods. It is the foundation of the contemporary nanometer-scale processing technology. In recent years, the technology of ion etching, ion implantation, ion plating and ion-sputter deposition in foreign countries The research and application has made great progress.