在射频激励CO2 波导激光器的研制中 ,关键技术是如何使射频电源的能量能最大限度地输入到激光放电区中以及在放电区均匀放电。本文在理论上详细论述了如何在激光头的射频电极上并联上一些电感 ,并在激光头和电源之间加一可调匹配网络以达到这一目的 ,并在实验上实现了矩形波导以及 1× 3和 2× 3波导列阵大面积的均匀放电 ,得到了激光输出 In the development of RF-excited CO2 waveguide lasers, the key technology is how to maximize the energy of the RF power supply into the laser discharge area and discharge uniformly in the discharge area. This paper discusses in detail how to connect some inductors in parallel with the RF electrode of the laser head and add an adjustable matching network between the laser head and the power supply in order to achieve this goal and experimentally realized a rectangular waveguide and a × 3 and 2 × 3 waveguide array uniform discharge on a large area, the laser output was obtained