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设计了一种平行板电容驱动MEMS扭转疲劳试验装置。通过理论分析和有限元分析两种方法去预测该装置的吸附电压,并将所得结果进行对比,证明两种方法具有一致性。最后通过对比试验结果与理论计算结果证实了该理论分析方法的有效性。同时也就证实了有限元分析方法的有效性。通过有限元分析得到的疲劳试样应力分布情况表明该装置可以达到MEMS疲劳测试所要求的应力水平。
A parallel plate capacitance-driven MEMS torsional fatigue test device is designed. Through theoretical analysis and finite element analysis of two methods to predict the adsorption voltage of the device, and the results were compared to prove that the two methods are consistent. Finally, the comparison between experimental results and theoretical calculations confirmed the validity of the theoretical analysis. At the same time, the validity of the finite element analysis method is proved. The stress distribution of the fatigue specimen obtained by finite element analysis shows that the device can reach the stress level required by the MEMS fatigue test.