本文介绍了一种在平移过程中倾斜误差远小于秒级的光学精密平移器(以下简称精平移器)的工作原理及应用范围,介绍了该器件的作用原理以及附加的位移平衡装置的作用。对各项性能指标的检测方法及其检测结果也进行了阐述。 This paper introduces the working principle and application range of an optical precision translator (hereinafter referred to as the translator) whose tilt error is far less than the second level during the translation process. The principle of the device and the role of the additional displacement equalizer are introduced. The test methods of various performance indexes and their test results are also described.