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精密工件圆度误差和仪器主轴径向旋转误差的分离技术是近十多年来发展起来的新的测量技术,用于提高两者的测量精确度。反向法误差分离技术是其中的一种。本文对反向法的测量精确度做了详细的理论分析和实验验证。从分析和实验验证中我们得出:许多精密工件和主轴系统的圆度误差主要由偶次谐波组成,而反向法是不能适当地分离出偶次谐波的。即除了第一种反向法外,其余的反向法不能完全分离开两者的圆度误差,对于同一工件反向法对多步法的相对测量误差大约为40%,这种测量精确度是不足的。本文的结论是对反向法误差分离技术的测量精确度的一种完全新颖的见解。
The separation precision of the roundness error of the precision workpiece and the radial rotation error of the main shaft of the instrument is a new measurement technique developed over the past decade and used to improve the measurement accuracy of the two. Inverse error separation technology is one of them. This paper does a detailed theoretical analysis and experimental verification of the measurement accuracy of the inverse method. From the analysis and experimental verification, we conclude that the roundness error of many precision workpieces and spindle systems mainly consists of even harmonics, whereas the reverse method can not properly separate even harmonics. In other words, except for the first inversion method, the other inverse methods can not completely separate the roundness error of the two methods, and the relative measurement error of the multi-step method for the same workpiece reverse method is about 40%. Such measurement accuracy Is not enough. The conclusion of this paper is a completely new insight into the measurement accuracy of the inverse error method.