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采用纳米压印、反应离子辅助刻蚀及物理溅射技术制作了周期为150 nm的铝光栅,用分光光度计测量了样品的透过率随入射光偏振方向变化的关系以及在可见、近红外波段TE,TM波的透射光谱。利用严格耦合波理论对光栅的上述性能进行了数值模拟和理论分析。考察了斜入射情况下样品的性能及损耗随入射角的变化关系。理论和实验结果表明,光栅的透过率对入射光的偏振态十分敏感:在近红外范围内(1000~2000 nm)对TE波完全反射,对TM波具有90%的透过率,并且在斜入射时因入射角的增大而轻微加强。此外,还比较了不同金属材料光栅的TM波近红外透射特性,探讨了改善其性能的途径。
Aluminum grating with a periodicity of 150 nm was fabricated by nanoimprinting, reactive ion assisted etching and physical sputtering. The relationship between the transmittance of the sample and the polarization of incident light was measured by spectrophotometer. The visible and near infrared Transmission spectrum of band TE, TM wave. The above-mentioned performance of the grating was numerically simulated and theoretically analyzed using a rigorous coupled wave theory. The relationship between the performance and the loss of the sample under oblique incidence with the incident angle is investigated. Theoretical and experimental results show that the grating transmittance is very sensitive to the polarization state of incident light: the TE wave is totally reflected in the near infrared (1000 ~ 2000 nm) and the transmittance of the TM wave is 90% Oblique incidence due to the incident angle increases and slightly strengthened. In addition, TM transmission characteristics of different metal grating are compared, and ways to improve its performance are also discussed.