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SiC是目前空间用大口径反射镜的首选材料,随着空间光学系统的发展,出现了1m以上空间用SiC反射镜的需求。对该反射镜采用焊接拼接然后再进行加工可以节约成本,降低风险。作为演示实验件,首先,对直径为600 mm的焊接SiC反射镜进行了焊接拼接,粗磨成型、精细研磨和粗抛光。然后,采用CCOS技术对反射镜进行了精抛光,并分析了加工过程中焊缝边缘优先去除的原因和抛光过程镜面变形对加工结果的影响。最后,反射镜面形收敛到RMS值1/20λ(λ=632.8 nm)。结果表明,所采用的焊接技术和加工工艺制造的反射镜可以满足空间反射镜的需要。
SiC is the material of choice for large-aperture mirrors in space at present. With the development of space optical systems, there is a demand for SiC mirrors with a space above 1 m. Welding the mirror with splicing and then machining can save costs and reduce risk. As a demonstration experiment, firstly, welding splicing, coarse grinding, fine grinding and coarse polishing of the welded SiC mirror with a diameter of 600 mm were carried out. Then the CCOS technology was used to finely polish the mirror. The reason of preferential removal of weld edge and the effect of mirror surface deformation on the processing result during the processing were analyzed. Finally, the mirror shape converges to an RMS value of 1 / 20λ (λ = 632.8 nm). The results show that the use of welding technology and manufacturing process mirrors to meet the needs of space mirrors.