采用洛氏压痕法对涂层-基体结合力进行评估,利用PVD磁控溅射系统分别在3种不同硬度的45钢基体表面制备了ZrN涂层,通过不同载荷的洛氏压痕试验,研究基体硬度、溅射时间和基体加热温度对涂层-基体结合力的影响。实验结果表明,可用压痕附近涂层的剥落程度来表征涂层-基体的结合力。随着基体硬度的升高,涂层-基体结合力提高;随着溅射时间的延长和基体加热温度的升高,涂层-基体结合力下降。 Using Rockwell indentation method to evaluate the coating-matrix bond strength, ZrN coatings were prepared on three different hardness 45 steel substrates respectively by PVD magnetron sputtering system. Through the Rockwell indentation test with different loadings, The effects of substrate hardness, sputtering time and substrate heating temperature on the coating-matrix bond strength were investigated. Experimental results show that the degree of exfoliation of the coating near the indentation can be used to characterize the coating-substrate bond. As the hardness of the matrix increases, the cohesion between the coating and the matrix increases; as the sputtering time increases and the heating temperature of the matrix increases, the cohesion of the coating and the matrix decreases.