多孔硅发射可见光的意义在于:(1)量子限域效应有着丰富的物理内涵;(2)使成本合理的光电集成成为可能。目前,普遍沿用Canham所报道的电化学腐蚀法制备多孔硅。在该方法中,采用铂金丝作阴极,单晶硅片作阳极,于HF溶液中进行电化学腐蚀。阳极与阴极间的 The significance of porous silicon emitting visible light lies in: (1) quantum confinement effect has rich physical connotation; (2) make the cost-effective optoelectronic integration possible. At present, porous silicon is generally prepared by the electrochemical etching method reported by Canham. In this method, a platinum wire is used as a cathode, and a monocrystalline silicon wafer is used as an anode, and is subjected to electrochemical etching in an HF solution. Between the anode and cathode