论文部分内容阅读
针对基片无损检测工作中缺陷粒子的清除问题,基于广义米氏理论,结合球形缺陷粒子对激光波束的散射理论,研究了沿基片水平方向入射高斯波束对介质球缺陷粒子的辐射力。根据连带勒让德函数及三角函数的正交关系,给出作用在高斯波束中介质缺陷球体粒子上的横向以及轴向辐射力的解析表达式,并分析不同参数对辐射力的影响。结果表明,随激光束腰半径的减小,辐射力峰值变大;随束腰半径增大,光轴的能量降低,散射力减小;随粒子折射率减小,散射力逐渐减小。工程上可通过减小激光波束束腰半径加大激光能量,以便更有效地清除缺陷粒子;亦可通过对辐射力的定量分析实现缺陷材质的检测。
Based on the generalized Mie theory and the scattering theory of the spherical defect particles on the laser beam, aiming at the problem of eliminating the defect particles in the non-destructive testing of the substrate, the radiation force of the Gaussian beam incident on the medium sphere defect particles along the horizontal direction of the substrate is studied. According to the orthogonal relationship between the Levent function and the trigonometric function, the analytical expressions of the lateral and axial radiative forces acting on the spherical particles in the Gaussian beam are given and the influence of different parameters on the radiative force is analyzed. The results show that with the decrease of radius of beam waist, the peak of radiation force becomes larger. With the increase of beam waist radius, the energy of optical axis decreases and the scattering power decreases. With the decrease of refractive index, the scattering power decreases gradually. Engineering can reduce the laser beam waist radius to increase the laser energy, in order to more effectively remove defects particles; also through the quantitative analysis of radiation to achieve defect detection of the material.