采用LD泵浦的单纵模Nd：YVO4倍频激光器、自聚焦棒以及三维精密调整架构成斐索型干涉仪，它具有同时测量微区振动和面形的功能，着重给出了测量微区面形的实验结果和理论分析。 The single-longitudinal-mode Nd: YVO4 frequency doubling laser with LD pump, self-focusing rod and three-dimensional precision adjusting frame form Fizeau interferometer. It has the function of measuring micro-area vibration and surface shape at the same time, Surface shape experimental results and theoretical analysis.