用对向靶溅射法(FTS)在(110)NdGaO_3基板上外延生长出La-Ca-Mn-O(LCMO)单晶薄膜,其三维晶体结构用高分辨率双晶X射线衍射技术(DCD)和掠面衍射技术(GID)分析,薄膜表面形貌用原子力显微镜(AFM)测量.结果表明,薄膜有c轴位于薄膜平面的类钙钛矿结构,所有已测量X射线衍射峰的摇摆曲线的半高宽度均约为0.01°,这是迄今报道过的陶瓷薄膜的最小结构参数.AFM图象清楚表明薄膜为单原子层状生长,表面原子层台阶高度为0.195nm.台阶宽度为360～400nm.台阶边缘沿(001)方向.原位生长的薄膜已具有较大的巨磁阻效应. The La-Ca-Mn-O (LCMO) single crystal thin film was epitaxially grown on the (110) NdGaO_3 substrate by opposite target sputtering (FTS). The three-dimensional crystal structure was epitaxially grown by high resolution dual-crystal X-ray diffraction ) And gravimetric analysis (GID), the surface morphology of the films was measured by atomic force microscopy (AFM) .The results show that the film has a c-axis perovskite-like structure with a c-axis in the plane of the film and all the rocking curves of the measured X-ray diffraction peaks Half width are about 0.01 °, which is reported to date the minimum structural parameters of the ceramic film.AFM images clearly show that the film is a single atomic layer growth, surface atomic layer height is 0.195nm step width of 360 ~ 400nm. The edge of the step along the (001) direction. In situ growth of the film has a greater giant magnetoresistance effect.